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Profilometers

MicroCamfiber-based optical non-contact 3D profilometers deliver:

  • High-speed surface and cross-sectional inspection
  • Online 3D measurements, GD&T and imaging
  • Long stroke profilometry with sub-micron resolution
  • Thickness, roughness and vibration measurements
  • Fiber-based probes which reach into bores, tubes, and crevices

Novacam MicroCam non-contact 3d profilometer with a 2-axes inspection station

Novacam non-contact 3D profilometer with a 2-axes inspection station

Overview

Measurements

  • Optical, non-contact, non-destructive
  • High speed:1-30 kHz and higher
  • Sub-micron resolution, excellent S/N ratio
  • 2D and 3D surface and subsurface characterization
  • Thickness, roughness, vibration

Imaging

  • Surface profiles
  • Cross-sections (B-scans, C-scans)
  • Volumetric images
Profile of a fuel cell bipolar plate

Fiber-based probes

  • Inspect inside hard-to-reach spaces
  • Provide versatility for high-speed online inspection
Intra-ocular lens: 2D optical cross-section created from thickness scan

System models

MicroCam-3D

    features the greatest imaging depth with excellent sensitivity at affordable price.

MicroCam-4D

    provides highest acquisition rate and very high sensitivity.

Custom solutions are also available.

ModelMicroCam-3DMicroCam-4D
Technologylow-coherence interferometry
Light wavelength1300 nm, infrared
Non-contact measurements
Depth of focusdepends on selected probe parameters,
see Parameter selection for standard probes table below
Scanning depth range options*4 mm8 mm6-10 mmup to 30 mm available with reduced speed
Acquisition (A-scan) rate2.10 kHz1.05 kHz16-30 kHz
Axial (Z-axis) resolution< 0.125 µm< 0.5 µm
Lateral (XY-plane) resolution5-75 µm, depends on selected probe parameters,
see Parameter selection for standard probes table below
Standoff distance3-100 mm for standard probes
up to 1 m for non-standard probes
Repeatability< 1 µm
Thickness measurements
Thickness measurement range (in Air, IR = 1.0)10 µm - 4 (or 8) mm10 µm - 6 mm
Typical materialsglass, polymers, multi-layer films, coatings, plastics, silicone, liquids, specular or non-specular
Sample reflectivity0.1 - 100%
 * To further increase maximum scanning depth, a mechanical displacement axis is available.Instrument safety:MicroCam non-contact profilometers are class 1M laser products with < 20 mW of infrared and < 5 mW of in-probe laser pointer.
 
Parameter Selection for Standard Probes
 Focal Distance (mm)
 12.719.030.050.075.0
Aperture (mm)Col 1 mmLateral resolution (µm)24.737.058.497.4146.0
Depth of focus (µm)739165441241145525773
Col 2.4 mmLateral resolution (µm)8.813.120.734.551.7
Depth of focus (µm)9320751714373233
Col 4 mmLateral resolution (µm)6.49.515.025.137.6
Depth of focus (µm)491102747601710
 This table shows the relationship of lateral resolution (light spot size), focal distance, depth of focus and probe aperture. Depth of focus is the distance on either side of the focal plane where light spot size is v2 (approx 1.42) bigger than the spot size in focus.

Key advantages

  • Wide range of materials: plastics, polymers, glass, metal coatings, silicone, adhesives; reflective, transparent, semi-transparent, specular, nonspecular
  • Wide range of objects and surfaces: small (several microns wide) to large (no upper limit) objects, stationary or moving, solids and liquids, interiors of bores and tubes, exteriors of cylinders, concave or convex spherical shapes, extremely hot or cold, radioactive
  • Non-contact probes work up to 1 m away from surface and more than 1 km from interferometer
  • Small-diameter probes reach in to measure insides of bores and small-diameter tubes
  • Acquires high-aspect-ratio surface features: channels, grooves, steps, sharp edges, and more
  • Continuous, long profile scanning: no area stitching required
  • Option of multiplexing probes with single interferometer for simultaneous measurements of several objects
  • Easy integration of fiber probes in labs and in process: on XY tables, on multi-axes scanning mechanisms, inside machining centers, above moving webs, etc.
  • Rugged probes: inspection possible in hostile environments where humans cannot work
  • USB connection for data transfer from interferometer to PC or laptop

Standard MicroCam system includes

  • MicroCam-3D interferometer with 4 mm depth range
  • 2-axes inspection station with manual elevator and 2-axes motion controller
  • 1 standard probe
  • PC with Novacam acquisition software
  • 1 year warranty

Applications

Metrology Applications

Typical measurements

3D profilometry and imaging of a coin with low-coherence interferometry.

 

3D metrology and imaging for industry and R&D

  • Quality control
  • Online 3D production inspection, GD&T
  • Statistical process control SPC
  • R&D

See applications across industries.

Gallery

Gallery

Sample images

Intra-ocular lens: 2D optical cross-section (B-Scan)

Intra-ocular lens: 2D optical cross-section (B-Scan)

Catheter tube (thin tube): optical cross-section

Catheter tube during extrusion: multilayer optical cross-section

Fuel cell bipolar plate – 3D surface with deep channels

Fuel cell bipolar plate: 3D surface with deep channels

BGA Flip chip in semiconductor industry - 2D profile

BGA Flip chip in semiconductor industry: 2D profile

BGA packaging in semiconductor industry – 3D surface imaging

BGA packaging in semiconductor industry: 3D surface

Unfolded image of gun barrel inside surface, encoded in false color: inspection of surface wear and surface defects.

Unfolded image of gun barrel inside surface, encoded in false color: inspection of surface wear and defects.

Plasma-coated cast metal strip: 3D surface map

Plasma-coated cast metal strip: 3D surface map

Blade edge inspection: CAD analysis of interferometer data

Blade edge inspection: CAD analysis

Vibration measurement graph from interferometric data

Vibration measurement graph from interferometric data

Software

Metrology Software

Data acquisition

Novacam high performance Data Acquisition Software is included with all MicroCam non-contact profilometers.

  • PC, Windows®-based
  • User-friendly interface for scan control on any Novacam inspection station (see Accessories tab)

The Application Programming Interface (API) is available for system integrators and OEMs. With the API, a wide variety online and offline applications can be accommodated.

Data acquisition of a gear head surface

Data acquisition of a gear head surface – click for closeup

Data analysis and 3D imaging

Data analysis and 3D imaging may take place offline or in real time.

  • Data output formats: point cloud, 32 bit tiff
  • Output exportable to:
    • CAD/CAM software: PolyWorks, Geomagic, SolidWorks, Creo Elements/Pro (Pro/ENGINEER), etc.
    • Imaging, visualization and numerical analysis software: ImageJ, Octave, MatLab, Mathematica, IDL, IGOR Pro
    • Surface and roughness analysis software
    • STL file format

Gearhead 3-dimensional surface images

Gearhead 3-dimensional surface images – click for closeup

Option: Novacam Volume Loss Application

Novacam Volume Loss Application processes the acquired surface dimensional data to determine volume loss from abrasion and wear:

  • with micron precision
  • on samples and components of various shapes and sizes

See more on determining volume loss.

Novacam Volume Loss Calculation Application

Novacam Volume Loss Application – click for closeup

Novacam Volume Loss Application: scan control user interface

Novacam Volume Loss Application – click for closeup

Accessories

Fiber-based optical probes

Standard probes

  • Standard 18mm: 18 mm diameter, front viewing or 90º
  • Standard small-diameter: choice of
    • 4 mm diameter
    • 2.5 mm diameter
    • 1.6 mm diameter

    front viewing or 90º

Novacam standard and small-diameter fiber-based optical probes

Novacam standard and small-diameter probes

Custom probes
Novacam designs and builds custom probes as needed. These can be:

  • Extra-small, with diameters as small as 0.9 mm
  • Rotational
  • Extra-long to reach into hard-to-reach spaces
  • Combined with galvanometers for efficient area or strip scanning
  • Extra rugged for high temperatures and extreme environments

2D Galvo scanner probe

2D Galvo scanner probe

Lab inspection stations

For lab and QA applications:

  • Inspection stations with probe displacement in 2, 3 or 4 axes
  • Granite tables optionally available and recommended for some applications

Probes may be integrated with 3rd party CMMs (coordinate-measuring machines), CNC (computer numerical control) machines, or any robots.

Novacam designs and builds custom benchtop fixtures as needed.

Novacam 2-axes inspection station with manual elevator

Novacam 2-axes inspection station with manual elevator

 

Inline probe fixtures

Web scanning can be accomplished

  • with a single scanning probe moving across the web or
  • with multiple stationary probes which are multiplexed by an optical switch.

Novacam designs and builds custom inline fixtures as needed.

 

Optical switches for use with multiple probes

Optical switches are available for multiplexing up to 8 probes to a single interferometer.

 

Specifications

System specifications

  • MicroCam Profilometer Systems Specification Sheet [coming soon]

 

Instrument safety

  • MicroCam systems feature an in-probe red laser pointer (650 nm wavelength) for alignment purposes.
  • MicroCam systems are Class 1M Laser products, with < 20 mW of infrared and < 5 mW of in-probe laser pointer.
MicroCam non-contact profilometers are Class 1M laser products

 

  • For additional information or assistance in selecting a non-contact profilometer system, please Contact us.