{"id":40258,"date":"2020-06-16T20:54:33","date_gmt":"2020-06-17T00:54:33","guid":{"rendered":"https:\/\/www.novacam.com\/?p=40258"},"modified":"2020-07-22T22:48:50","modified_gmt":"2020-07-23T02:48:50","slug":"cmp-pad-and-groove-3d-measurements","status":"publish","type":"post","link":"https:\/\/www.novacam.com\/fr\/2020\/06\/16\/cmp-pad-and-groove-3d-measurements\/","title":{"rendered":"Mesure de tampons et de rainures CMP dans l'industrie des semi-conducteurs"},"content":{"rendered":"\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-5glagiy-24c7678ee694fc0d79d9f1210d9df560\">\n.flex_column.av-5glagiy-24c7678ee694fc0d79d9f1210d9df560{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-5glagiy-24c7678ee694fc0d79d9f1210d9df560 av_one_full  avia-builder-el-0  el_before_av_hr  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-jta74thu-22f5031782dd0fe4bc4bafd01ae05a96 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h1><strong>3D metrology of CMP pads and grooves<\/strong><\/h1>\n<p>Published on June 16, 2020<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jta76ch1-54a185ff26301b40a16157b105ff1e0d\">\n#top .hr.hr-invisible.av-jta76ch1-54a185ff26301b40a16157b105ff1e0d{\nheight:30px;\n}\n<\/style>\n<div  class='hr av-jta76ch1-54a185ff26301b40a16157b105ff1e0d hr-invisible  avia-builder-el-2  el_after_av_one_full  el_before_av_one_half '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4ritlre-77e79f35f081374d59dacef470d61ed9\">\n.flex_column.av-4ritlre-77e79f35f081374d59dacef470d61ed9{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4ritlre-77e79f35f081374d59dacef470d61ed9 av_one_half  avia-builder-el-3  el_after_av_hr  el_before_av_one_half  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-jta78nsh-b67b46ce6fe86653fd5e58718b9eba3f '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>What are CMP pads and why measure them?<\/h2>\n<p><strong>CMP pads are consumables<\/strong> used in the <strong>CMP (chemical mechanical polishing or planarization) process <\/strong>employed in the semi-conductor industry to flatten and polish silicon wafers. The pads are disk shaped, most commonly made from hard and porous polyurethane foam, and patterned with narrow high-aspect-ratio grooves (see image).<\/p>\n<p>The <strong>function of the CMP process<\/strong> is to improve the performance of silicon wafers, which in turn are used in the development of high-performance microprocessor and memory chips. Since wafers are built up in several layers, each wafer typically undergoes the CMP process several times.<\/p>\n<p><strong>High-precision 3D metrology of CMP pads is required<\/strong> both in the pad manufacture and during the CMP process to ensure maximum process efficiency and efficacy.<\/p>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4bg49re-2fbdad1b94a234a63346651bbd05fcce\">\n.flex_column.av-4bg49re-2fbdad1b94a234a63346651bbd05fcce{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4bg49re-2fbdad1b94a234a63346651bbd05fcce av_one_half  avia-builder-el-5  el_after_av_one_half  el_before_av_one_half  flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-jx666scd-59dabc5e72311d9f16d1e57844b44500 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_40173\" style=\"width: 749px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-40173\" class=\"wp-image-40173 size-full\" title=\"CMP pad measurement example - scan of 10x10mm square of pad surface\" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682.jpg\" alt=\"CMP pad measurement example - close-up of a 10x10mm square of CMP pad surface, and 3D point cloud data obtained with Novacam SurfaceInspect reveals the depth and shape of the narrow channels down to the micron.\" width=\"739\" height=\"446\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682.jpg 739w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682-300x181.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682-80x48.jpg 80w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682-705x425.jpg 705w\" sizes=\"auto, (max-width: 739px) 100vw, 739px\" \/><\/a><p id=\"caption-attachment-40173\" class=\"wp-caption-text\">CMP pad measurement example &#8211; close-up of a 10x10mm square of CMP pad surface, and 3D point cloud data obtained with Novacam SurfaceInspect reveals the depth and shape of the narrow channels down to the micron.<\/p><\/div>\n<\/div><\/section><\/div><\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4ritlre-77e79f35f081374d59dacef470d61ed9\">\n.flex_column.av-4ritlre-77e79f35f081374d59dacef470d61ed9{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4ritlre-77e79f35f081374d59dacef470d61ed9 av_one_half  avia-builder-el-7  el_after_av_one_half  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jta78nsh-b67b46ce6fe86653fd5e58718b9eba3f '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>How does the CMP process work?<\/h2>\n<p>In the CMP process:<\/p>\n<ul>\n<li>The <strong>silicon wafer<\/strong> is mounted on a rotating <strong>wafer carrier<\/strong> and pressed against a <strong>CMP pad<\/strong> affixed on a rotating <strong>platen<\/strong>.<\/li>\n<li>At the same time, ultra-fine chemical <strong>polishing slurry<\/strong> is sprayed onto and channeled around the pad surface. Slurry distribution is done via tiny narrow <strong>grooves<\/strong> machined in specific patterns on the CMP pad surface.<\/li>\n<li>The corrosiveness of the slurry together with the asperities on the CMP pad surface wear away the wafer surface until the desired flatness and polish are achieved.<\/li>\n<li>To extend the lifespan of the CMP pad, the pad is typically reconditioned on a continuous or intermittent basis.\u00a0 This is done using a <strong>pad conditioner<\/strong>, which slices and pops open newly uncovered bubbles in the pad with diamond tips on its surface.<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4bg49re-2fbdad1b94a234a63346651bbd05fcce\">\n.flex_column.av-4bg49re-2fbdad1b94a234a63346651bbd05fcce{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4bg49re-2fbdad1b94a234a63346651bbd05fcce av_one_half  avia-builder-el-9  el_after_av_one_half  el_before_av_one_half  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jx666scd-59dabc5e72311d9f16d1e57844b44500 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_40264\" style=\"width: 996px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-chemical-mechanical-planarization-polishing-process-diagram.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-40264\" class=\"wp-image-40264 size-full\" title=\"Simplified diagram of CMP (Chemical Mechanical Planarization\/Polishing) process\" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-chemical-mechanical-planarization-polishing-process-diagram.jpg\" alt=\"Simplified diagram of CMP (Chemical Mechanical Planarization\/Polishing) process\" width=\"986\" height=\"698\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-chemical-mechanical-planarization-polishing-process-diagram.jpg 986w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-chemical-mechanical-planarization-polishing-process-diagram-300x212.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-chemical-mechanical-planarization-polishing-process-diagram-80x57.jpg 80w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-chemical-mechanical-planarization-polishing-process-diagram-768x544.jpg 768w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-chemical-mechanical-planarization-polishing-process-diagram-260x185.jpg 260w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-chemical-mechanical-planarization-polishing-process-diagram-705x499.jpg 705w\" sizes=\"auto, (max-width: 986px) 100vw, 986px\" \/><\/a><p id=\"caption-attachment-40264\" class=\"wp-caption-text\">Simplified diagram of CMP (Chemical Mechanical Planarization\/Polishing) process<\/p><\/div>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4ritlre-77e79f35f081374d59dacef470d61ed9\">\n.flex_column.av-4ritlre-77e79f35f081374d59dacef470d61ed9{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4ritlre-77e79f35f081374d59dacef470d61ed9 av_one_half  avia-builder-el-11  el_after_av_one_half  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jta78nsh-b67b46ce6fe86653fd5e58718b9eba3f '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>Why is quality control of CMP pads crucial?<\/h2>\n<p>First, both the silicon wafer and the CMP pads are costly items.<\/p>\n<p>Second, the geometry and condition of CMP pad surfaces greatly affects CMP process efficacy.<\/p>\n<ul>\n<li>For example, the <strong>grooves on CMP pads<\/strong> must be measured because the pattern, depth, and shape of these tiny channels influence slurry consumption and distribution, material removal rate (MRR), the rate of accumulation of polishing debris, as well as potential creation of scratches on wafers by this debris.<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4bg49re-2fbdad1b94a234a63346651bbd05fcce\">\n.flex_column.av-4bg49re-2fbdad1b94a234a63346651bbd05fcce{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4bg49re-2fbdad1b94a234a63346651bbd05fcce av_one_half  avia-builder-el-13  el_after_av_one_half  el_before_av_one_half  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jx666scd-59dabc5e72311d9f16d1e57844b44500 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_40155\" style=\"width: 810px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-40155\" class=\"wp-image-40155 size-full\" title=\"Zoom-in view of one of a CMP pad groove with tool marks on the groove bottom readily visible. Measurements are in mm.\" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up.jpg\" alt=\"Zoom-in view of one of a CMP pad groove with tool marks on the groove bottom readily visible. Measurements are in mm.\" width=\"800\" height=\"417\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up.jpg 800w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up-300x156.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up-80x42.jpg 80w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up-768x400.jpg 768w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up-705x367.jpg 705w\" sizes=\"auto, (max-width: 800px) 100vw, 800px\" \/><\/a><p id=\"caption-attachment-40155\" class=\"wp-caption-text\">Zoom-in view of one of a CMP pad groove with tool marks on the groove bottom readily visible. Measurements are in mm.<\/p><\/div>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4ritlre-77e79f35f081374d59dacef470d61ed9\">\n.flex_column.av-4ritlre-77e79f35f081374d59dacef470d61ed9{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4ritlre-77e79f35f081374d59dacef470d61ed9 av_one_half  avia-builder-el-15  el_after_av_one_half  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jta78nsh-b67b46ce6fe86653fd5e58718b9eba3f '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>3D measurements for CMP pad manufacture and CMP process in general<\/h2>\n<p>Novacam 3D metrology systems are uniquely suitable to carry out fast, high-precision 3D metrology of:<\/p>\n<ul>\n<li>CMP pads, including the hard-to-measure grooves and lands (the surface between the grooves)<\/li>\n<li>CMP pad conditioners<\/li>\n<li>Wafers, including their flatness.<\/li>\n<\/ul>\n<p>Novacam systems&#8217; capabilities include:<\/p>\n<ul>\n<li>Non-contact 3D surface measurements with 1 \u03bcm (40 \u03bcin.) axial resolution<\/li>\n<li>Ability to scan high-aspect-ratio features such as the narrow CMP pad grooves<\/li>\n<li>High-speed surface acquisition \u2013 up to 100,000 3D measurements\/sec<\/li>\n<li>Dimensional and roughness measurements with the same probe<\/li>\n<li>Ability to obtain long profiles<\/li>\n<li>Facility for automated measurement both in lab and in high-volume automated production.<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4bg49re-2fbdad1b94a234a63346651bbd05fcce\">\n.flex_column.av-4bg49re-2fbdad1b94a234a63346651bbd05fcce{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4bg49re-2fbdad1b94a234a63346651bbd05fcce av_one_half  avia-builder-el-17  el_after_av_one_half  el_before_av_one_full  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jx666scd-59dabc5e72311d9f16d1e57844b44500 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_40156\" style=\"width: 810px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-40156\" class=\"wp-image-40156 size-full\" title=\"View from below of the CMP pad grooves clearly shows the tool marks of the bit used to machine the channels. \" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity.jpg\" alt=\"View from below of the CMP pad grooves clearly shows the tool marks of the bit used to machine the channels. Perfect cylinders were fitted on each groove to obtain a mean radius measurement. Here, the measured radii of curvature were found to vary between 475 and 528 \u03bcm\" width=\"800\" height=\"478\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity.jpg 800w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity-300x179.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity-80x48.jpg 80w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity-768x459.jpg 768w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity-705x421.jpg 705w\" sizes=\"auto, (max-width: 800px) 100vw, 800px\" \/><\/a><p id=\"caption-attachment-40156\" class=\"wp-caption-text\">View from below of the CMP pad grooves clearly shows the tool marks of the bit used to machine the channels. Perfect cylinders were fitted on each groove to obtain a mean radius measurement. Here, the measured radii of curvature were found to vary between 475 and 528 \u03bcm<\/p><\/div>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-tix1n-03fbeadfae75efb106c9dae7b5f0320c\">\n.flex_column.av-tix1n-03fbeadfae75efb106c9dae7b5f0320c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-tix1n-03fbeadfae75efb106c9dae7b5f0320c av_one_full  avia-builder-el-19  el_after_av_one_half  el_before_av_three_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-24dm3-a3b9ceb628b014aead43fab5d2a507b7 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>Would you like to learn more?<\/h2>\n<ul>\n<li>Check out our new <a href=\"https:\/\/www.novacam.com\/applications\/cmp-pad-measurement\/\">CMP pad measurement<\/a> application page<\/li>\n<li><a style=\"background-color: rgba(var(--whitebusterr), var(--whitebusterg), var(--whitebusterb), 1);\" href=\"https:\/\/www.novacam.com\/pdf\/ApplicationNote_CMP_Pad_3D_Metrology.pdf\">Read Novacam&#8217;s &#8220;CMP Pad Metrology&#8221; application note [PDF, 4 pages]<\/a><span style=\"background-color: rgba(var(--whitebusterr), var(--whitebusterg), var(--whitebusterb), 1);\">.\u00a0<\/span><\/li>\n<\/ul>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-581bax-45968cf977c1a46167a9dd12e20221fe\">\n.flex_column.av-581bax-45968cf977c1a46167a9dd12e20221fe{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-581bax-45968cf977c1a46167a9dd12e20221fe av_three_fifth  avia-builder-el-21  el_after_av_one_full  el_before_av_one_third  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jkjvf8u9-5f98cc73d0df968d952d9611bdec24b1 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h2 style=\"text-align: left;\">Do you need to measure CMP pads, CMP pad conditioners and wafers?<\/h2>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-3i3l8p-c05e2cae05f0b2f3157a3245207010de\">\n.flex_column.av-3i3l8p-c05e2cae05f0b2f3157a3245207010de{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-3i3l8p-c05e2cae05f0b2f3157a3245207010de av_one_third  avia-builder-el-23  el_after_av_three_fifth  el_before_av_hr  flex_column_div av-zero-column-padding  column-top-margin'     ><div  class='avia-button-wrap av-jkoi6qsv-232cddeefb8073a4569c32f792c0a636-wrap avia-button-left  avia-builder-el-24  avia-builder-el-no-sibling '>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jkoi6qsv-232cddeefb8073a4569c32f792c0a636\">\n#top #wrap_all .avia-button.av-jkoi6qsv-232cddeefb8073a4569c32f792c0a636{\nbackground-color:#ffa403;\nborder-color:#ffa403;\ncolor:#ffffff;\ntransition:all 0.4s ease-in-out;\n}\n#top #wrap_all .avia-button.av-jkoi6qsv-232cddeefb8073a4569c32f792c0a636 .avia-svg-icon svg:first-child{\nfill:#ffffff;\nstroke:#ffffff;\n}\n<\/style>\n<a href='https:\/\/www.novacam.com\/fr\/nous-contacter-2\/nous-contacter\/'  class='avia-button av-jkoi6qsv-232cddeefb8073a4569c32f792c0a636 av-link-btn avia-icon_select-no avia-size-x-large avia-position-left'   aria-label=\"Contact Novacam\"><span class='avia_iconbox_title' >Contact Novacam<\/span><\/a><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jta76ch1-54a185ff26301b40a16157b105ff1e0d\">\n#top .hr.hr-invisible.av-jta76ch1-54a185ff26301b40a16157b105ff1e0d{\nheight:30px;\n}\n<\/style>\n<div  class='hr 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av-24dm3-a3b9ceb628b014aead43fab5d2a507b7 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p><a href=\"https:\/\/www.novacam.com\/pdf\/ApplicationNote_CMP_Pad_3D_Metrology.pdf\">\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-3m1tdz-b270831ef608938363c1f22dc62478a6\">\n.av_font_icon.av-3m1tdz-b270831ef608938363c1f22dc62478a6 .av-icon-char{\nfont-size:30px;\nline-height:30px;\n}\n<\/style>\n<span  class='av_font_icon av-3m1tdz-b270831ef608938363c1f22dc62478a6 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-iconfont avia-font-entypo-fontello av-no-color avia-icon-animate'><span class='av-icon-char' data-av_icon='\ue82d' data-av_iconfont='entypo-fontello' aria-hidden=\"true\" ><\/span><\/span> Download application note &#8220;CMP Pad Metrology&#8221;<\/a> [4 pages, PDF, 0.5 MB] for more details on this application<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-tix1n-530b10d03969bfeb80ab87309988dedf\">\n.flex_column.av-tix1n-530b10d03969bfeb80ab87309988dedf{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-tix1n-530b10d03969bfeb80ab87309988dedf av_one_third  avia-builder-el-31  el_after_av_one_third  el_before_av_one_third  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-24dm3-a3b9ceb628b014aead43fab5d2a507b7 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" >\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-cn0sb-06317cc36f0cbcb81254298732237865\">\n.av_font_icon.av-cn0sb-06317cc36f0cbcb81254298732237865 .av-icon-char{\nfont-size:20px;\nline-height:20px;\n}\n<\/style>\n<span  class='av_font_icon av-cn0sb-06317cc36f0cbcb81254298732237865 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-iconfont avia-font-entypo-fontello av-no-color avia-icon-animate'><span class='av-icon-char' data-av_icon='\ue81e' data-av_iconfont='entypo-fontello' aria-hidden=\"true\" ><\/span><\/span>\n<p>See related applications:<\/p>\n<ul>\n<li><a href=\"https:\/\/www.novacam.com\/applications\/cmp-pad-measurement\/\">CMP pad measurement<\/a><\/li>\n<li><a href=\"https:\/\/www.novacam.com\/applications\/high-aspect-ratio-surfaces\/\">Measuring high-aspect-ratio surfaces<\/a><\/li>\n<li><a href=\"https:\/\/www.novacam.com\/applications\/\">&#8230; and more\u00a0<\/a><\/li>\n<\/ul>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-tix1n-8a7f8cc25c43c46e94cc3d44ce8407dd\">\n.flex_column.av-tix1n-8a7f8cc25c43c46e94cc3d44ce8407dd{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  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data-av_iconfont='entypo-fontello' aria-hidden=\"true\" ><\/span><\/span>Back to News &amp; Events list<\/a><\/p>\n<\/div><\/section><\/div>\n<div  class='hr av-x28awa-84b40b54bdd6cbae92a2ef95d71b5a23 hr-default  avia-builder-el-37  el_after_av_one_third  el_before_av_social_share '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<div  class='av-social-sharing-box av-k4brii6y-cdfc4e3096e66559fa0760a37372dcf0 av-social-sharing-box-default  avia-builder-el-38  el_after_av_hr  avia-builder-el-last  av-social-sharing-box-fullwidth'><div class=\"av-share-box\"><h5 class='av-share-link-description av-no-toc '>Share this blog article<\/h5><ul class=\"av-share-box-list noLightbox\"><li class='av-share-link av-social-link-linkedin avia_social_iconfont' ><a target=\"_blank\" aria-label=\"Share on LinkedIn\" href='https:\/\/linkedin.com\/shareArticle?mini=true&#038;title=CMP%20pad%20and%20groove%20measurement%20in%20the%20semiconductor%20industry&#038;url=https:\/\/www.novacam.com\/fr\/2020\/06\/16\/cmp-pad-and-groove-3d-measurements\/' data-av_icon='\ue8fc' data-av_iconfont='entypo-fontello'  title='' data-avia-related-tooltip='Share on LinkedIn'><span class='avia_hidden_link_text'>Share on LinkedIn<\/span><\/a><\/li><li class='av-share-link av-social-link-reddit avia_social_iconfont' ><a target=\"_blank\" aria-label=\"Share on Reddit\" href='https:\/\/reddit.com\/submit?url=https:\/\/www.novacam.com\/fr\/2020\/06\/16\/cmp-pad-and-groove-3d-measurements\/&#038;title=CMP%20pad%20and%20groove%20measurement%20in%20the%20semiconductor%20industry' data-av_icon='\ue927' data-av_iconfont='entypo-fontello'  title='' data-avia-related-tooltip='Share on Reddit'><span class='avia_hidden_link_text'>Share on Reddit<\/span><\/a><\/li><li class='av-share-link av-social-link-mail avia_social_iconfont' ><a  aria-label=\"Share by Mail\" href='mailto:?subject=CMP%20pad%20and%20groove%20measurement%20in%20the%20semiconductor%20industry&#038;body=https:\/\/www.novacam.com\/fr\/2020\/06\/16\/cmp-pad-and-groove-3d-measurements\/' data-av_icon='\ue805' data-av_iconfont='entypo-fontello'  title='' data-avia-related-tooltip='Share by Mail'><span class='avia_hidden_link_text'>Share by Mail<\/span><\/a><\/li><\/ul><\/div><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Les syst\u00e8mes de m\u00e9trologie 3D de Novacam sont particuli\u00e8rement sp\u00e9cialis\u00e9s dans la mesure des minuscules rainures \u00e9troites qui forment les patins CMP dans l'industrie des semi-conducteurs.  D\u00e9couvrez comment le processus de haute pr\u00e9cision d'aplanissement et de polissage des plaquettes de silicium b\u00e9n\u00e9ficie des mesures 3D sans contact fournies par les syst\u00e8mes Novacam.<\/p>","protected":false},"author":3,"featured_media":40161,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_relevanssi_hide_post":"","_relevanssi_hide_content":"","_relevanssi_pin_for_all":"","_relevanssi_pin_keywords":"","_relevanssi_unpin_keywords":"","_relevanssi_related_keywords":"","_relevanssi_related_include_ids":"","_relevanssi_related_exclude_ids":"","_relevanssi_related_no_append":"","_relevanssi_related_not_related":"","_relevanssi_related_posts":"","_relevanssi_noindex_reason":"","footnotes":""},"categories":[27,4],"tags":[108,107,113,110,109,100,111,112],"class_list":["post-40258","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-all","category-news","tag-chemical-mechanical-polishing","tag-cmp-pad","tag-conditioning-pad","tag-groove-depth","tag-grooves","tag-high-aspect-ratio","tag-semiconductor","tag-wafer-measurement"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.6 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>CMP pad and groove measurement in the semiconductor industry - Novacam<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.novacam.com\/fr\/2020\/06\/16\/cmp-pad-and-groove-3d-measurements\/\" \/>\n<meta property=\"og:locale\" content=\"fr_CA\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"CMP pad and groove measurement in the semiconductor industry - Novacam\" \/>\n<meta property=\"og:description\" content=\"Measuring the tiny narrow grooves that pattern CMP pads in the semi-conductor industry are a particular specialty of Novacam 3D metrology systems. 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