{"id":40124,"date":"2020-06-05T16:18:51","date_gmt":"2020-06-05T20:18:51","guid":{"rendered":"https:\/\/www.novacam.com\/?page_id=40124"},"modified":"2021-04-09T11:51:52","modified_gmt":"2021-04-09T15:51:52","slug":"cmp-pad-measurement","status":"publish","type":"page","link":"https:\/\/www.novacam.com\/fr\/applications\/mesure-du-cmp-pad-2\/","title":{"rendered":"Mesure du tampon CMP"},"content":{"rendered":"<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-80c49z-c6663695d59d4c617bdf88803c59b777\">\n.flex_column.av-80c49z-c6663695d59d4c617bdf88803c59b777{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-80c49z-c6663695d59d4c617bdf88803c59b777 av_one_full  avia-builder-el-0  el_before_av_one_half  avia-builder-el-first  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-khpgjb-982919f68461e0f301c2d3a72f7381f4'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h1>Mesure 3D sans contact des tampons CMP<\/h1>\n<p><strong>Syst\u00e8me de mesure : <\/strong>NOVACAM<sup><small>TM<\/small><\/sup>\u00a0<a href=\"https:\/\/www.novacam.com\/fr\/products\/profilometers\/\">PROFILOM\u00c8TRE OPTIQUE 3D<sup><small>TM<\/small><\/sup><\/a> ou <a href=\"https:\/\/www.novacam.com\/fr\/products\/surfaceinspect-pour-3d-metrologie-dimensions-rugosite-epaisseur-2\/\">SURFACEINSPECT<sup><small>TM<\/small><\/sup><\/a> syst\u00e8me<br \/>\n<strong>Mots-cl\u00e9s :<\/strong> polissage m\u00e9canique chimique, haute pr\u00e9cision, inspection de rainures, de canaux, de terrains, de profils, de topographie de surface \u00e0 rapport d'aspect \u00e9lev\u00e9<\/p>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-6betxz-427e74353f3e45e93d8e6c412fb237a3\">\n.flex_column.av-6betxz-427e74353f3e45e93d8e6c412fb237a3{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-6betxz-427e74353f3e45e93d8e6c412fb237a3 av_one_half  avia-builder-el-2  el_after_av_one_full  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-khpgjb-982919f68461e0f301c2d3a72f7381f4'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>Contr\u00f4le de la qualit\u00e9 des surfaces des tampons CMP<\/h2>\n<p>Les tampons CMP (planarisation\/polissage chimico-m\u00e9canique) sont des tampons en mousse de polyur\u00e9thane en forme de disque utilis\u00e9s dans la fabrication de semi-conducteurs pour les dispositifs de circuits int\u00e9gr\u00e9s avanc\u00e9s.  En particulier, les tampons sont utilis\u00e9s dans le processus CMP pour aplanir et polir les plaquettes de silicium jusqu'\u00e0 ce qu'elles aient une finition miroir.<\/p>\n<p>L'efficacit\u00e9 du processus CMP d\u00e9pend en grande partie de la g\u00e9om\u00e9trie de la surface du tampon.  C'est pourquoi le contr\u00f4le de la qualit\u00e9 (CQ) des surfaces des tampons CMP s'effectue \u00e0 deux niveaux :<\/p>\n<ol>\n<li><strong>Pendant la fabrication des tampons CMP,<\/strong> L'inspection CQ comprend des mesures de l'ensemble de la surface du tampon, y compris des mesures g\u00e9om\u00e9triques des rainures et des surfaces (surface entre les rainures).  Les fabricants qui obtiennent et suivent les mesures de chaque patin sont en mesure de fournir \u00e0 leurs clients des rapports de contr\u00f4le de qualit\u00e9.<\/li>\n<li><strong>Au cours du processus CMP<\/strong>L'inspection CQ sert \u00e0 d\u00e9terminer le degr\u00e9 d'usure de la surface des plaquettes caus\u00e9e par le dur processus CMP. La profondeur des rainures, par exemple, peut \u00eatre mesur\u00e9e de fa\u00e7on intermittente pour s'assurer que la profondeur des rainures est suffisante pour continuer \u00e0 utiliser le m\u00eame tampon.<\/li>\n<\/ol>\n<\/div><\/section><\/div><\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4vkmav-02e60343d12c4b24e2120b7c313f2e88\">\n.flex_column.av-4vkmav-02e60343d12c4b24e2120b7c313f2e88{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4vkmav-02e60343d12c4b24e2120b7c313f2e88 av_one_half  avia-builder-el-4  el_after_av_one_half  el_before_av_one_half  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jwtannsi-997f862f7e35fdfa924e1d7748e870bc'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_40173\" style=\"width: 749px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-40173\" class=\"wp-image-40173 size-full\" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682.jpg\" alt=\"Les syst\u00e8mes de m\u00e9trologie 3D sans contact de NOVACAM permettent d&#039;inspecter avec une pr\u00e9cision de l&#039;ordre du micron les tampons de CMP et d&#039;assurer un contr\u00f4le rigoureux de la qualit\u00e9 des surfaces pour les fabricants de CMP. (Les mesures indiqu\u00e9es sont en mm, l&#039;analyse a \u00e9t\u00e9 faite avec le logiciel GD&amp;T PolyWorks Inspector).\" width=\"739\" height=\"446\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682.jpg 739w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682-300x181.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682-80x48.jpg 80w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682-705x425.jpg 705w\" sizes=\"auto, (max-width: 739px) 100vw, 739px\" \/><\/a><p id=\"caption-attachment-40173\" class=\"wp-caption-text\">Micron-precision CMP pad inspection with NOVACAM non-contact 3D metrology systems fully supports strict surface quality control for CMP manufacturers. (Measurements shown are in mm, analysis done with PolyWorks Inspector industry-standard GD&amp;T software).<\/p><\/div>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2tuign-e8bc0c318a25cabcdfecca0bd083b5cb\">\n.flex_column.av-2tuign-e8bc0c318a25cabcdfecca0bd083b5cb{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2tuign-e8bc0c318a25cabcdfecca0bd083b5cb av_one_half  avia-builder-el-6  el_after_av_one_half  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-khpgjb-982919f68461e0f301c2d3a72f7381f4'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>Mesures de tampons CMP : 3D, haute pr\u00e9cision, sans contact, automatis\u00e9<\/h2>\n<p>NOVACAM<sup><small>TM<\/small><\/sup> Les syst\u00e8mes de m\u00e9trologie 3D offrent aux fabricants de tampons CMP des capacit\u00e9s sans pr\u00e9c\u00e9dent pour des mesures rapides et compl\u00e8tes. Ces capacit\u00e9s sont notamment les suivantes<\/p>\n<ul>\n<li>Mesures de surface 3D sans contact avec une r\u00e9solution axiale de 1 \u03bcm (40 \u03bcin).<\/li>\n<li>Capacit\u00e9 \u00e0 num\u00e9riser des caract\u00e9ristiques \u00e0 rapport d'aspect \u00e9lev\u00e9, telles que les \u00e9troites rainures des tampons CMP<\/li>\n<li>Acquisition de surface \u00e0 grande vitesse - jusqu'\u00e0 100 000 mesures 3D\/s<\/li>\n<li>Mesures dimensionnelles et de rugosit\u00e9 avec la m\u00eame sonde<\/li>\n<li>Capacit\u00e9 \u00e0 obtenir des profils longs<\/li>\n<li>Installation pour les mesures automatis\u00e9es en laboratoire et dans la production automatis\u00e9e \u00e0 haut volume.<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4vkmav-02e60343d12c4b24e2120b7c313f2e88\">\n.flex_column.av-4vkmav-02e60343d12c4b24e2120b7c313f2e88{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4vkmav-02e60343d12c4b24e2120b7c313f2e88 av_one_half  avia-builder-el-8  el_after_av_one_half  el_before_av_one_half  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jwtannsi-997f862f7e35fdfa924e1d7748e870bc'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_40155\" style=\"width: 810px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-40155\" class=\"wp-image-40155 size-full\" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up.jpg\" alt=\"Vue en zoom d&#039;une des rainures d&#039;un tampon CMP, avec des marques d&#039;outil sur le fond de la rainure bien visibles. La profondeur des rainures est comprise entre 0,750 et 0,800 mm. \" width=\"800\" height=\"417\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up.jpg 800w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up-300x156.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up-80x42.jpg 80w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up-768x400.jpg 768w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up-705x367.jpg 705w\" sizes=\"auto, (max-width: 800px) 100vw, 800px\" \/><\/a><p id=\"caption-attachment-40155\" class=\"wp-caption-text\">Vue en zoom d'une rainure d'un tampon de CMP avec les marques d'outils sur le fond de la rainure bien visibles. Les mesures sont exprim\u00e9es en mm.<\/p><\/div>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-6betxz-427e74353f3e45e93d8e6c412fb237a3\">\n.flex_column.av-6betxz-427e74353f3e45e93d8e6c412fb237a3{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-6betxz-427e74353f3e45e93d8e6c412fb237a3 av_one_half  avia-builder-el-10  el_after_av_one_half  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-khpgjb-982919f68461e0f301c2d3a72f7381f4'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>Exemple de mesure du tampon CMP<\/h2>\n<p>Une zone de 10 mm x 10 mm de la surface d'un tampon CMP a \u00e9t\u00e9 scann\u00e9e avec NOVACAM <a href=\"https:\/\/www.novacam.com\/fr\/products\/surfaceinspect-pour-3d-metrologie-dimensions-rugosite-epaisseur-2\/\">Syst\u00e8me SURFACEINSPECT<\/a>Le syst\u00e8me d'information sur la sant\u00e9 (SIS) permet d'obtenir un nuage de points en 3D avec des mesures d'une pr\u00e9cision de l'ordre du micron \u00e0 des fins d'analyse.<\/p>\n<p>En zoomant sur les rainures, les marques d'outils sur le fond des rainures sont facilement visibles.<\/p>\n<p>La profondeur des rainures a \u00e9t\u00e9 \u00e9tudi\u00e9e et il a \u00e9t\u00e9 d\u00e9montr\u00e9 qu'elle variait entre 0,768 et 0,793 mm.<\/p>\n<p>Une analyse de la forme du fond de la rainure a \u00e9t\u00e9 effectu\u00e9e. Des cylindres parfaits ont \u00e9t\u00e9 install\u00e9s sur chaque rainure afin d'obtenir une mesure du rayon moyen. Les rayons de courbure mesur\u00e9s varient entre 475 et 528 \u03bcm.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2tuign-934c262bf25bbd88fd1186d18fb7a057\">\n.flex_column.av-2tuign-934c262bf25bbd88fd1186d18fb7a057{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2tuign-934c262bf25bbd88fd1186d18fb7a057 av_one_half  avia-builder-el-12  el_after_av_one_half  el_before_av_one_half  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-khpgjb-982919f68461e0f301c2d3a72f7381f4'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_40156\" style=\"width: 810px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-40156\" class=\"wp-image-40156 size-full\" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity.jpg\" alt=\"La vue de dessous des rainures du tampon CMP montre clairement les marques de l&#039;outil utilis\u00e9 pour usiner les canaux. Des cylindres parfaits ont \u00e9t\u00e9 mont\u00e9s sur chaque rainure afin d&#039;obtenir une mesure du rayon moyen. Ici, les rayons de courbure mesur\u00e9s se sont av\u00e9r\u00e9s varier entre 475 et 528 \u03bcm.\" width=\"800\" height=\"478\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity.jpg 800w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity-300x179.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity-80x48.jpg 80w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity-768x459.jpg 768w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity-705x421.jpg 705w\" sizes=\"auto, (max-width: 800px) 100vw, 800px\" \/><\/a><p id=\"caption-attachment-40156\" class=\"wp-caption-text\">La vue de dessous des rainures du tampon CMP montre clairement les marques de l'outil utilis\u00e9 pour usiner les canaux. Des cylindres parfaits ont \u00e9t\u00e9 mont\u00e9s sur chaque rainure afin d'obtenir une mesure du rayon moyen. Ici, les rayons de courbure mesur\u00e9s se sont av\u00e9r\u00e9s varier entre 475 et 528 \u03bcm.<\/p><\/div>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2tuign-e8bc0c318a25cabcdfecca0bd083b5cb\">\n.flex_column.av-2tuign-e8bc0c318a25cabcdfecca0bd083b5cb{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2tuign-e8bc0c318a25cabcdfecca0bd083b5cb av_one_half  avia-builder-el-14  el_after_av_one_half  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-khpgjb-982919f68461e0f301c2d3a72f7381f4'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>Le d\u00e9fi de la mesure des rainures des tampons CMP<\/h2>\n<p>En raison de l'\u00e9troitesse de l'ouverture de la rainure, il est difficile, voire impossible, d'inspecter la g\u00e9om\u00e9trie compl\u00e8te des fonds de rainure \u00e0 l'aide de palpeurs ou de syst\u00e8mes optiques reposant sur la triangulation.<\/p>\n<p>En revanche, les syst\u00e8mes de m\u00e9trologie 3D de NOVACAM n'ont aucun probl\u00e8me \u00e0 mesurer m\u00eame les coins inf\u00e9rieurs des rainures \u00e0 parois abruptes.  Cela est d\u00fb au fait qu'ils scannent de mani\u00e8re colin\u00e9aire, c'est-\u00e0-dire que le faisceau de lumi\u00e8re se d\u00e9place vers le haut et vers le bas le long de la m\u00eame trajectoire.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2tuign-934c262bf25bbd88fd1186d18fb7a057\">\n.flex_column.av-2tuign-934c262bf25bbd88fd1186d18fb7a057{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2tuign-934c262bf25bbd88fd1186d18fb7a057 av_one_half  avia-builder-el-16  el_after_av_one_half  el_before_av_one_half  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-khpgjb-982919f68461e0f301c2d3a72f7381f4'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_39182\" style=\"width: 631px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-with-grooves-height-measurement-profile.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-39182\" class=\"wp-image-39182 size-full\" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-with-grooves-height-measurement-profile.jpg\" alt=\"Un simple profil lin\u00e9aire du tampon CMP indique la profondeur et la forme des rainures usin\u00e9es de canalisation de la boue.\" width=\"621\" height=\"283\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-with-grooves-height-measurement-profile.jpg 621w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-with-grooves-height-measurement-profile-300x137.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-with-grooves-height-measurement-profile-140x64.jpg 140w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-with-grooves-height-measurement-profile-450x205.jpg 450w\" sizes=\"auto, (max-width: 621px) 100vw, 621px\" \/><\/a><p id=\"caption-attachment-39182\" class=\"wp-caption-text\">Un simple profil lin\u00e9aire du tampon CMP indique la profondeur et la forme des rainures usin\u00e9es de canalisation de la boue.<\/p><\/div>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-5v3c93-ecc53d7805d7fc20196321d52e2cea43\">\n.flex_column.av-5v3c93-ecc53d7805d7fc20196321d52e2cea43{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-5v3c93-ecc53d7805d7fc20196321d52e2cea43 av_one_half  avia-builder-el-18  el_after_av_one_half  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-62y9fr-527ce9df8581ce4723b4b8fec98c1784'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>Profils longs pour des mesures rapides en cours de processus<\/h2>\n<p>Les syst\u00e8mes de m\u00e9trologie 3D NOVACAM permettent d'optimiser le processus d'inspection des tampons CMP en mesurant rapidement et efficacement \u00e0 l'aide de sondes optiques \u00e0 fibre optique.  Les sondes sont mont\u00e9es sur des portiques ou des platines de pr\u00e9cision au-dessus des tampons CMP.<\/p>\n<p>En fonction des exigences de leurs applications, les fabricants choisissent parmi deux types de sondes :<\/p>\n<ul>\n<li>sondes standard (partie de NOVACAM <a href=\"https:\/\/www.novacam.com\/fr\/products\/profilometers\/\">Syst\u00e8me de PROFILOM\u00c8TRE 3D OPTIQUE)<\/a>\u00a0et<\/li>\n<li>sondes galv\u00e9es (partie de NOVACAM <a href=\"https:\/\/www.novacam.com\/fr\/products\/surfaceinspect-pour-3d-metrologie-dimensions-rugosite-epaisseur-2\/\">Syst\u00e8me SURFACEINSPECT<\/a>) qui num\u00e9risent selon un mod\u00e8le de trame.<\/li>\n<\/ul>\n<p>Quel que soit le type de sonde choisi, le balayage est effectu\u00e9 point par point \u00e0 une vitesse de 100 000 mesures de points 3D par seconde le long de trajectoires de balayage d\u00e9finies par l'utilisateur.<\/p>\n<p>La mesure de profils longs est disponible et appr\u00e9ci\u00e9e dans les applications de mesure CMP. Elle \u00e9limine la n\u00e9cessit\u00e9 d'un tuilage et d'un piquage fastidieux qui seraient n\u00e9cessaires avec des syst\u00e8mes de mesure de type microscope.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4s85vr-d76ff5da023ee22cfc57aa62b3b7b6d3\">\n.flex_column.av-4s85vr-d76ff5da023ee22cfc57aa62b3b7b6d3{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4s85vr-d76ff5da023ee22cfc57aa62b3b7b6d3 av_one_half  avia-builder-el-20  el_after_av_one_half  el_before_av_one_half  flex_column_div av-zero-column-padding  column-top-margin'     ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jwtchs1p-7c44953e6df62ef324e99f27e28ee5d0\">\n#top .hr.hr-invisible.av-jwtchs1p-7c44953e6df62ef324e99f27e28ee5d0{\nheight:10px;\n}\n<\/style>\n<div  class='hr av-jwtchs1p-7c44953e6df62ef324e99f27e28ee5d0 hr-invisible  avia-builder-el-21  el_before_av_textblock  avia-builder-el-first'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<section  class='av_textblock_section av-jpa3mag9-28cfbb8997c3a2efb6da83618a6886e2'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_39248\" style=\"width: 890px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-39248\" class=\"wp-image-39248 size-full\" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact.jpg\" alt=\"Un balayage plus espac\u00e9 du tampon CMP - comme ce profil tous les 1 mm - peut \u00eatre s\u00e9lectionn\u00e9 pour suivre la forme et la profondeur des rainures du tampon CMP.\" width=\"880\" height=\"519\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact.jpg 880w, https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact-300x177.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact-140x83.jpg 140w, https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact-768x453.jpg 768w, https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact-705x416.jpg 705w, https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact-450x265.jpg 450w\" sizes=\"auto, (max-width: 880px) 100vw, 880px\" \/><\/a><p id=\"caption-attachment-39248\" class=\"wp-caption-text\">Un balayage plus espac\u00e9 du tampon CMP - comme ce profil tous les 1 mm - peut \u00eatre s\u00e9lectionn\u00e9 pour suivre la forme et la profondeur des rainures du tampon CMP.<\/p><\/div>\n<\/div><\/section><\/p><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4s85vr-bfe29829761be769d04406df8ca4142e\">\n.flex_column.av-4s85vr-bfe29829761be769d04406df8ca4142e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4s85vr-bfe29829761be769d04406df8ca4142e av_one_half  avia-builder-el-23  el_after_av_one_half  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-62y9fr-527ce9df8581ce4723b4b8fec98c1784'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>Avantages du syst\u00e8me<\/h2>\n<h4>Avantages pour les fabricants de tampons CMP<\/h4>\n<p>Gr\u00e2ce \u00e0 l'int\u00e9gration automatique et transparente des donn\u00e9es de mesure dans le contr\u00f4le du processus, les fabricants de tampons CMP sont en mesure de.. :<\/p>\n<ul>\n<li>Effectuer l'inspection 100% des tampons<\/li>\n<li>Fournir \u00e0 leurs clients un rapport de contr\u00f4le de qualit\u00e9 pour chaque tampon.<\/li>\n<li>Enregistrement et suivi des mesures afin d'optimiser l'utilisation des consommables dans leur processus de fabrication<\/li>\n<\/ul>\n<h4>Avantages pour les installations utilisant des proc\u00e9d\u00e9s CMP<\/h4>\n<p>Les gestionnaires de processus peuvent utiliser le m\u00eame syst\u00e8me de m\u00e9trologie 3D pour.. :<\/p>\n<ul>\n<li>Contr\u00f4le de la g\u00e9om\u00e9trie de la surface de la plate-forme CMP<\/li>\n<li>Mesure des conditionneurs de surface<\/li>\n<li>Mesure des plaquettes.<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-dlfgn-8865b9461ef64a453fb4ae463c21d91f\">\n.flex_column.av-dlfgn-8865b9461ef64a453fb4ae463c21d91f{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-dlfgn-8865b9461ef64a453fb4ae463c21d91f av_one_half  avia-builder-el-25  el_after_av_one_half  el_before_av_one_full  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jpa3jc48-da248a2bc2941d89ff5303fdd6b0bbe0'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_40159\" style=\"width: 1040px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-40159\" class=\"wp-image-40159 size-large\" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness-1030x710.jpg\" alt=\"Analyse du terrain (surface sup\u00e9rieure) du tampon CMP : le nuage de points 3D de la surface sup\u00e9rieure mesur\u00e9e est affich\u00e9 sous la forme d&#039;une carte de d\u00e9viation en couleur par rapport \u00e0 un plan plat. La valeur de plan\u00e9it\u00e9 GD&amp;T calcul\u00e9e est indiqu\u00e9e dans l&#039;encart vert.\" width=\"1030\" height=\"710\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness-1030x710.jpg 1030w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness-300x207.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness-80x55.jpg 80w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness-768x529.jpg 768w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness-705x486.jpg 705w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness.jpg 1323w\" sizes=\"auto, (max-width: 1030px) 100vw, 1030px\" \/><\/a><p id=\"caption-attachment-40159\" class=\"wp-caption-text\">CMP pad land (top surface) analysis: the 3D point cloud of the measured top surface is displayed as a colour deviation map from a flat plane. The calculated GD&amp;T flatness value is shown in the green callout.<\/p><\/div>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-fwyxf-d0f77978b5dff1d1367f98950eefe160\">\n.flex_column.av-fwyxf-d0f77978b5dff1d1367f98950eefe160{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-fwyxf-d0f77978b5dff1d1367f98950eefe160 av_one_full  avia-builder-el-27  el_after_av_one_half  el_before_av_one_third  first flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jhc3ylfa-e69f3d2ea4f1ca45379132611fcff224\">\n#top .av-special-heading.av-jhc3ylfa-e69f3d2ea4f1ca45379132611fcff224{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-jhc3ylfa-e69f3d2ea4f1ca45379132611fcff224 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-jhc3ylfa-e69f3d2ea4f1ca45379132611fcff224 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-jhc3ylfa-e69f3d2ea4f1ca45379132611fcff224 av-special-heading-h3  avia-builder-el-28  avia-builder-el-no-sibling'><h3 class='av-special-heading-tag'  itemprop=\"headline\"  >Liens connexes<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-tix1n-03fbeadfae75efb106c9dae7b5f0320c\">\n.flex_column.av-tix1n-03fbeadfae75efb106c9dae7b5f0320c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-tix1n-03fbeadfae75efb106c9dae7b5f0320c av_one_third  avia-builder-el-29  el_after_av_one_full  el_before_av_one_third  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-24dm3-a3b9ceb628b014aead43fab5d2a507b7'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><a href=\"https:\/\/www.novacam.com\/pdf\/ApplicationNote_CMP_Pad_3D_Metrology.pdf\">\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-3m1tdz-b270831ef608938363c1f22dc62478a6\">\n.av_font_icon.av-3m1tdz-b270831ef608938363c1f22dc62478a6 .av-icon-char{\nfont-size:30px;\nline-height:30px;\n}\n<\/style>\n<span  class='av_font_icon av-3m1tdz-b270831ef608938363c1f22dc62478a6 avia_animate_when_visible av-icon-style- avia-icon-pos-left av-no-color avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue82d' data-av_iconfont='entypo-fontello' ><\/span><\/span> T\u00e9l\u00e9charger la note d'application \"M\u00e9trologie des tampons CMP\" (en anglais)<\/a> [4 pages, PDF, 0.5 MB] pour plus de d\u00e9tails sur cette application<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-18g1gr-3fb8df32a9c94486c488f834c640d0cd\">\n.flex_column.av-18g1gr-3fb8df32a9c94486c488f834c640d0cd{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-18g1gr-3fb8df32a9c94486c488f834c640d0cd av_one_third  avia-builder-el-32  el_after_av_one_third  el_before_av_one_third  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-3ncs3-9755d2f2237c148e459fbf79ca214fb4'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-waioz-15129e036111ecc60b49fc74d64c8916\">\n.av_font_icon.av-waioz-15129e036111ecc60b49fc74d64c8916 .av-icon-char{\nfont-size:30px;\nline-height:30px;\n}\n<\/style>\n<span  class='av_font_icon av-waioz-15129e036111ecc60b49fc74d64c8916 avia_animate_when_visible av-icon-style- avia-icon-pos-left av-no-color avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue826' data-av_iconfont='entypo-fontello' ><\/span><\/span> Voir les produits utilis\u00e9s pour la mesure du CMP :<\/p>\n<ul>\n<li><a href=\"https:\/\/www.novacam.com\/fr\/products\/profilometers\/\">Syst\u00e8me de PROFILOM\u00c8TRE 3D OPTIQUE<\/a><\/li>\n<li><a href=\"https:\/\/www.novacam.com\/fr\/products\/surfaceinspect-pour-3d-metrologie-dimensions-rugosite-epaisseur-2\/\">Syst\u00e8me SURFACEINSPECT<\/a><\/li>\n<\/ul>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-18g1gr-3fb8df32a9c94486c488f834c640d0cd\">\n.flex_column.av-18g1gr-3fb8df32a9c94486c488f834c640d0cd{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-18g1gr-3fb8df32a9c94486c488f834c640d0cd av_one_third  avia-builder-el-35  el_after_av_one_third  avia-builder-el-last  flex_column_div av-zero-column-padding  column-top-margin'     ><p><div  class='avia-button-wrap av-jkoi6qsv-1173e5cca7a987612e23820de3bc7f83-wrap avia-button-left  avia-builder-el-36  el_before_av_textblock  avia-builder-el-first'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jkoi6qsv-1173e5cca7a987612e23820de3bc7f83\">\n#top #wrap_all .avia-button.av-jkoi6qsv-1173e5cca7a987612e23820de3bc7f83{\nbackground-color:#ff9900;\nborder-color:#ff9900;\ncolor:#ffffff;\ntransition:all 0.4s ease-in-out;\n}\n<\/style>\n<a href='https:\/\/www.novacam.com\/fr\/nous-contacter-2\/nous-contacter\/'  class='avia-button av-jkoi6qsv-1173e5cca7a987612e23820de3bc7f83 av-link-btn avia-icon_select-no avia-size-x-large avia-position-left'  ><span class='avia_iconbox_title' >Contactez nous !<\/span><\/a><\/div><br \/>\n<section  class='av_textblock_section av-3ncs3-9755d2f2237c148e459fbf79ca214fb4'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><a href=\"https:\/\/www.novacam.com\/fr\/nous-contacter-2\/nous-contacter\/\">\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1v8pg3-48925116ff62d88059331475f774c943\">\n.av_font_icon.av-1v8pg3-48925116ff62d88059331475f774c943 .av-icon-char{\nfont-size:30px;\nline-height:30px;\n}\n<\/style>\n<span  class='av_font_icon av-1v8pg3-48925116ff62d88059331475f774c943 avia_animate_when_visible av-icon-style- avia-icon-pos-left av-no-color avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue80b' data-av_iconfont='entypo-fontello' ><\/span><\/span><\/a>\u00a0<a href=\"https:\/\/www.novacam.com\/fr\/nous-contacter-2\/nous-contacter\/\">Contactez nous<\/a>\u00a0ou <a href=\"https:\/\/www.novacam.com\/fr\/nous-contacter-2\/demander-un-echantillon-danalyse\/\">demander une analyse d'\u00e9chantillon gratuite<\/a> pour savoir comment les syst\u00e8mes de m\u00e9trologie 3D de NOVACAM peuvent vous aider \u00e0 contr\u00f4ler la qualit\u00e9 de vos produits.<\/p>\n<\/div><\/section><\/p><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":3,"featured_media":0,"parent":5488,"menu_order":12,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_relevanssi_hide_post":"","_relevanssi_hide_content":"","_relevanssi_pin_for_all":"on","_relevanssi_pin_keywords":"","_relevanssi_unpin_keywords":"","_relevanssi_related_keywords":"","_relevanssi_related_include_ids":"","_relevanssi_related_exclude_ids":"","_relevanssi_related_no_append":"","_relevanssi_related_not_related":"","_relevanssi_related_posts":"","_relevanssi_noindex_reason":"","footnotes":"","advanced-sidebar-menu\/link-title":"","advanced-sidebar-menu\/exclude-page":false},"class_list":["post-40124","page","type-page","status-publish","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v26.2 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>CMP pad measurement - Novacam<\/title>\n<meta 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