{"id":40124,"date":"2020-06-05T16:18:51","date_gmt":"2020-06-05T20:18:51","guid":{"rendered":"https:\/\/www.novacam.com\/?page_id=40124"},"modified":"2021-04-09T11:51:52","modified_gmt":"2021-04-09T15:51:52","slug":"cmp-pad-measurement","status":"publish","type":"page","link":"https:\/\/www.novacam.com\/fr\/applications\/mesure-du-cmp-pad-2\/","title":{"rendered":"Mesure du tampon CMP"},"content":{"rendered":"\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-80c49z-c6663695d59d4c617bdf88803c59b777\">\n.flex_column.av-80c49z-c6663695d59d4c617bdf88803c59b777{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-80c49z-c6663695d59d4c617bdf88803c59b777 av_one_full  avia-builder-el-0  el_before_av_one_half  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-khpgjb-982919f68461e0f301c2d3a72f7381f4 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h1>Non-contact 3D measurement of CMP pads<\/h1>\n<p><strong>Measuring System: <\/strong>NOVACAM<sup><small>TM<\/small><\/sup>\u00a0<a href=\"https:\/\/www.novacam.com\/products\/profilometers\/\">OPTICAL 3D PROFILOMETER<sup><small>TM<\/small><\/sup><\/a> or <a href=\"https:\/\/www.novacam.com\/products\/surfaceinspect-for-3d-metrology-dimensions-roughness-thickness\/\">SURFACEINSPECT<sup><small>TM<\/small><\/sup><\/a> system<br \/>\n<strong>Keywords:<\/strong> chemical mechanical polishing, high-precision, inspection of high-aspect-ratio grooves, channels, lands, profile, surface topography<\/p>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-6betxz-427e74353f3e45e93d8e6c412fb237a3\">\n.flex_column.av-6betxz-427e74353f3e45e93d8e6c412fb237a3{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-6betxz-427e74353f3e45e93d8e6c412fb237a3 av_one_half  avia-builder-el-2  el_after_av_one_full  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-khpgjb-982919f68461e0f301c2d3a72f7381f4 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>Quality control of CMP pad surfaces<\/h2>\n<p>CMP (chemical mechanical planarization\/polishing) pads are disk-shaped polyurethane foam pads used in semiconductor manufacture of advanced integrated circuit devices.\u00a0 In particular, the pads are used in the CMP process to flatten and polish silicon wafers to mirror-like finish.<\/p>\n<p>The efficiency and efficacy of the CMP process depends in large part on the pad surface geometry.\u00a0 This is why quality control (QC) measurement of CMP pad surfaces takes place on two levels:<\/p>\n<ol>\n<li><strong>During CMP pad manufacture,<\/strong> QC inspection includes measurements of the entire pad surface, including geometry measurements of the grooves and the lands (surface between the grooves).\u00a0 Manufacturers who obtain and track measurements on each pad are able to provide clients with QC reports.<\/li>\n<li><strong>During the CMP process<\/strong>, QC inspection serves to determine the degree of surface wear of the pads caused by the the harsh CMP process. The depth of grooves, for example may be measured intermittently to ascertain that groove depth is adequate to keep using the same pad.<\/li>\n<\/ol>\n<\/div><\/section><\/div><\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4vkmav-02e60343d12c4b24e2120b7c313f2e88\">\n.flex_column.av-4vkmav-02e60343d12c4b24e2120b7c313f2e88{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4vkmav-02e60343d12c4b24e2120b7c313f2e88 av_one_half  avia-builder-el-4  el_after_av_one_half  el_before_av_one_half  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jwtannsi-997f862f7e35fdfa924e1d7748e870bc '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_40173\" style=\"width: 749px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-40173\" class=\"wp-image-40173 size-full\" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682.jpg\" alt=\"Micron-precision CMP pad inspection with NOVACAM non-contact 3D metrology systems fully supports strict surface quality control for CMP manufacturers. (Measurements shown are in mm, analysis done with PolyWorks Inspector industry-standard GD&amp;T software).\" width=\"739\" height=\"446\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682.jpg 739w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682-300x181.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682-80x48.jpg 80w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682-705x425.jpg 705w\" sizes=\"auto, (max-width: 739px) 100vw, 739px\" \/><\/a><p id=\"caption-attachment-40173\" class=\"wp-caption-text\">Micron-precision CMP pad inspection with NOVACAM non-contact 3D metrology systems fully supports strict surface quality control for CMP manufacturers. (Measurements shown are in mm, analysis done with PolyWorks Inspector industry-standard GD&amp;T software).<\/p><\/div>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2tuign-e8bc0c318a25cabcdfecca0bd083b5cb\">\n.flex_column.av-2tuign-e8bc0c318a25cabcdfecca0bd083b5cb{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2tuign-e8bc0c318a25cabcdfecca0bd083b5cb av_one_half  avia-builder-el-6  el_after_av_one_half  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-khpgjb-982919f68461e0f301c2d3a72f7381f4 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>CMP pad measurements: 3D, high precision, non-contact, automated<\/h2>\n<p>NOVACAM<sup><small>TM<\/small><\/sup> 3D metrology systems bring CMP pad manufacturers unprecedented capabilities for fast and comprehensive measurements. These capabilities include:<\/p>\n<ul>\n<li>Non-contact 3D surface measurements with 1 \u03bcm (40 \u03bcin.) axial resolution<\/li>\n<li>Ability to scan high-aspect-ratio features such as the narrow CMP pad grooves<\/li>\n<li>High-speed surface acquisition &#8211; up to 100,000 3D measurements\/sec<\/li>\n<li>Dimensional and roughness measurements with the same probe<\/li>\n<li>Ability to obtain long profiles<\/li>\n<li>Facility for automated measurement both in lab and in high-volume automated production.<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4vkmav-02e60343d12c4b24e2120b7c313f2e88\">\n.flex_column.av-4vkmav-02e60343d12c4b24e2120b7c313f2e88{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4vkmav-02e60343d12c4b24e2120b7c313f2e88 av_one_half  avia-builder-el-8  el_after_av_one_half  el_before_av_one_half  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jwtannsi-997f862f7e35fdfa924e1d7748e870bc '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_40155\" style=\"width: 810px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-40155\" class=\"wp-image-40155 size-full\" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up.jpg\" alt=\"Zoom-in view of one of a CMP pad groove with tool marks on the groove bottom readily visible. The depth of the grooves is seen to range between 0.750 and 0.800 mm. \" width=\"800\" height=\"417\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up.jpg 800w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up-300x156.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up-80x42.jpg 80w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up-768x400.jpg 768w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-measurement-of-grooves_2-close-up-705x367.jpg 705w\" sizes=\"auto, (max-width: 800px) 100vw, 800px\" \/><\/a><p id=\"caption-attachment-40155\" class=\"wp-caption-text\">Zoom-in view of one of a CMP pad groove with tool marks on the groove bottom readily visible. Measurements are in mm.<\/p><\/div>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-6betxz-427e74353f3e45e93d8e6c412fb237a3\">\n.flex_column.av-6betxz-427e74353f3e45e93d8e6c412fb237a3{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-6betxz-427e74353f3e45e93d8e6c412fb237a3 av_one_half  avia-builder-el-10  el_after_av_one_half  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-khpgjb-982919f68461e0f301c2d3a72f7381f4 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>CMP pad measurement example<\/h2>\n<p>A 10mm x 10mm area of a CMP pad surface was scanned with NOVACAM <a href=\"https:\/\/www.novacam.com\/products\/surfaceinspect-for-3d-metrology-dimensions-roughness-thickness\/\">SURFACEINSPECT system<\/a>, providing a 3D point cloud of micron-precision measurements for analysis.<\/p>\n<p>In zoom-in view of\u00a0 the grooves, tool marks on groove bottoms are readily visible.<\/p>\n<p>The depth of grooves was querried, with depth shown to vary between .768 and .793 mm.<\/p>\n<p>Groove bottom shape analysis was performed. Perfect cylinders were fitted on each groove to obtain a mean radius measurement. Here, the measured radii of curvature were found to vary between 475 and 528 \u03bcm.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2tuign-934c262bf25bbd88fd1186d18fb7a057\">\n.flex_column.av-2tuign-934c262bf25bbd88fd1186d18fb7a057{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2tuign-934c262bf25bbd88fd1186d18fb7a057 av_one_half  avia-builder-el-12  el_after_av_one_half  el_before_av_one_half  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-khpgjb-982919f68461e0f301c2d3a72f7381f4 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_40156\" style=\"width: 810px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-40156\" class=\"wp-image-40156 size-full\" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity.jpg\" alt=\"View from below of the CMP pad grooves clearly shows the tool marks of the bit used to machine the channels. Perfect cylinders were fitted on each groove to obtain a mean radius measurement. Here, the measured radii of curvature were found to vary between 475 and 528 \u03bcm\" width=\"800\" height=\"478\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity.jpg 800w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity-300x179.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity-80x48.jpg 80w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity-768x459.jpg 768w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_3-groove-profile-cylindricity-705x421.jpg 705w\" sizes=\"auto, (max-width: 800px) 100vw, 800px\" \/><\/a><p id=\"caption-attachment-40156\" class=\"wp-caption-text\">View from below of the CMP pad grooves clearly shows the tool marks of the bit used to machine the channels. Perfect cylinders were fitted on each groove to obtain a mean radius measurement. Here, the measured radii of curvature were found to vary between 475 and 528 \u03bcm<\/p><\/div>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2tuign-e8bc0c318a25cabcdfecca0bd083b5cb\">\n.flex_column.av-2tuign-e8bc0c318a25cabcdfecca0bd083b5cb{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2tuign-e8bc0c318a25cabcdfecca0bd083b5cb av_one_half  avia-builder-el-14  el_after_av_one_half  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-khpgjb-982919f68461e0f301c2d3a72f7381f4 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>The challenge of measuring CMP pad grooves<\/h2>\n<p>Due to the narrowness of the groove opening, inspecting the full geometry of groove bottoms is difficult or impossible with touch probes or with optical systems that rely on triangulation.<\/p>\n<p>In contrast, NOVACAM 3D metrology systems have no problem measuring even bottom corners of the steep walled grooves.\u00a0 This is thanks to the fact that they\u00a0 scan in collinear manner \u2013 i.e., the beam of light travels up and down along the same path.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2tuign-934c262bf25bbd88fd1186d18fb7a057\">\n.flex_column.av-2tuign-934c262bf25bbd88fd1186d18fb7a057{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2tuign-934c262bf25bbd88fd1186d18fb7a057 av_one_half  avia-builder-el-16  el_after_av_one_half  el_before_av_one_half  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-khpgjb-982919f68461e0f301c2d3a72f7381f4 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_39182\" style=\"width: 631px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-with-grooves-height-measurement-profile.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-39182\" class=\"wp-image-39182 size-full\" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-with-grooves-height-measurement-profile.jpg\" alt=\"A simple linear profile of CMP pad indicates the depth and shape of the machined slurry-channeling grooves.\" width=\"621\" height=\"283\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-with-grooves-height-measurement-profile.jpg 621w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-with-grooves-height-measurement-profile-300x137.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-with-grooves-height-measurement-profile-140x64.jpg 140w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-with-grooves-height-measurement-profile-450x205.jpg 450w\" sizes=\"auto, (max-width: 621px) 100vw, 621px\" \/><\/a><p id=\"caption-attachment-39182\" class=\"wp-caption-text\">A simple linear profile of CMP pad indicates the depth and shape of the machined slurry-channeling grooves.<\/p><\/div>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-5v3c93-ecc53d7805d7fc20196321d52e2cea43\">\n.flex_column.av-5v3c93-ecc53d7805d7fc20196321d52e2cea43{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-5v3c93-ecc53d7805d7fc20196321d52e2cea43 av_one_half  avia-builder-el-18  el_after_av_one_half  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-62y9fr-527ce9df8581ce4723b4b8fec98c1784 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>Long profiles for fast in-process measurements<\/h2>\n<p>Helping optimize the CMP pad inspection process, NOVACAM 3D metrology systems measure\u00a0 rapidly and efficiently with fiber-based optical probes.\u00a0 The probes are mounted on gantries or precision stages above the CMP pads.<\/p>\n<p>Depending on their application requirements, manufacturers select from two basic types of probes:<\/p>\n<ul>\n<li>standard probes (part of NOVACAM <a href=\"https:\/\/www.novacam.com\/products\/profilometers\/\">OPTICAL 3D PROFILOMETER system)<\/a>\u00a0and<\/li>\n<li>galvo probes (part of NOVACAM <a href=\"https:\/\/www.novacam.com\/products\/surfaceinspect-for-3d-metrology-dimensions-roughness-thickness\/\">SURFACEINSPECT system<\/a>) which scan in a raster pattern.<\/li>\n<\/ul>\n<p>Whichever type of probe is selected, scanning is performed in a point-by-point manner at a rate of 100,000 3D point measurements per second along user-defined scan paths.<\/p>\n<p>Long-profile measurement is available and is prized in CMP measurement applications. It eliminates the need for time consuming tiling and stitching that would be required by microscope-type measurement systems.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4s85vr-d76ff5da023ee22cfc57aa62b3b7b6d3\">\n.flex_column.av-4s85vr-d76ff5da023ee22cfc57aa62b3b7b6d3{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4s85vr-d76ff5da023ee22cfc57aa62b3b7b6d3 av_one_half  avia-builder-el-20  el_after_av_one_half  el_before_av_one_half  flex_column_div av-zero-column-padding  column-top-margin'     ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jwtchs1p-7c44953e6df62ef324e99f27e28ee5d0\">\n#top .hr.hr-invisible.av-jwtchs1p-7c44953e6df62ef324e99f27e28ee5d0{\nheight:10px;\n}\n<\/style>\n<div  class='hr av-jwtchs1p-7c44953e6df62ef324e99f27e28ee5d0 hr-invisible  avia-builder-el-21  el_before_av_textblock  avia-builder-el-first '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<section  class='av_textblock_section av-jpa3mag9-28cfbb8997c3a2efb6da83618a6886e2 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_39248\" style=\"width: 890px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-39248\" class=\"wp-image-39248 size-full\" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact.jpg\" alt=\"A sparser scan of the CMP pad - such as this profile only every 1 mm - may be selected to track CMP pad groove shape and depth.\" width=\"880\" height=\"519\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact.jpg 880w, https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact-300x177.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact-140x83.jpg 140w, https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact-768x453.jpg 768w, https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact-705x416.jpg 705w, https:\/\/www.novacam.com\/wp-content\/uploads\/Semiconductor-CMP-pad-groove-measurement-in-3D-non-contact-450x265.jpg 450w\" sizes=\"auto, (max-width: 880px) 100vw, 880px\" \/><\/a><p id=\"caption-attachment-39248\" class=\"wp-caption-text\">A sparser scan of the CMP pad &#8211; such as this profile only every 1 mm &#8211; may be selected to track CMP pad groove shape and depth.<\/p><\/div>\n<\/div><\/section><\/p><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4s85vr-bfe29829761be769d04406df8ca4142e\">\n.flex_column.av-4s85vr-bfe29829761be769d04406df8ca4142e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4s85vr-bfe29829761be769d04406df8ca4142e av_one_half  avia-builder-el-23  el_after_av_one_half  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-62y9fr-527ce9df8581ce4723b4b8fec98c1784 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h2>System benefits<\/h2>\n<h4>Benefits to CMP pad manufacturers<\/h4>\n<p>With scan measurement data fed automatically and seamlessly into process control, CMP pad manufacturers are able to:<\/p>\n<ul>\n<li>Carry out 100% inspection of the pads<\/li>\n<li>Provide their customers with a QC report with each pad<\/li>\n<li>Log and trend measurements to optimize the use of consumables in their manufacture process<\/li>\n<\/ul>\n<h4>Benefits to facilities running CMP processes<\/h4>\n<p>Process managers are able to use the same 3D metrology system for:<\/p>\n<ul>\n<li>Monitoring of CMP pad surface geometry<\/li>\n<li>Measurement of surface pad conditioners<\/li>\n<li>Measurement of the wafers.<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-dlfgn-8865b9461ef64a453fb4ae463c21d91f\">\n.flex_column.av-dlfgn-8865b9461ef64a453fb4ae463c21d91f{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-dlfgn-8865b9461ef64a453fb4ae463c21d91f av_one_half  avia-builder-el-25  el_after_av_one_half  el_before_av_one_full  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jpa3jc48-da248a2bc2941d89ff5303fdd6b0bbe0 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"attachment_40159\" style=\"width: 1040px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-40159\" class=\"wp-image-40159 size-large\" src=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness-1030x710.jpg\" alt=\"CMP pad land (top surface) analysis: the 3D point cloud of the measured top surface is displayed as a colour deviation map from a flat plane. The calculated GD&amp;T flatness value is shown in the green callout.\" width=\"1030\" height=\"710\" srcset=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness-1030x710.jpg 1030w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness-300x207.jpg 300w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness-80x55.jpg 80w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness-768x529.jpg 768w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness-705x486.jpg 705w, https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-land-flatness.jpg 1323w\" sizes=\"auto, (max-width: 1030px) 100vw, 1030px\" \/><\/a><p id=\"caption-attachment-40159\" class=\"wp-caption-text\">CMP pad land (top surface) analysis: the 3D point cloud of the measured top surface is displayed as a colour deviation map from a flat plane. The calculated GD&amp;T flatness value is shown in the green callout.<\/p><\/div>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-fwyxf-d0f77978b5dff1d1367f98950eefe160\">\n.flex_column.av-fwyxf-d0f77978b5dff1d1367f98950eefe160{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-fwyxf-d0f77978b5dff1d1367f98950eefe160 av_one_full  avia-builder-el-27  el_after_av_one_half  el_before_av_one_third  first flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jhc3ylfa-e69f3d2ea4f1ca45379132611fcff224\">\n#top .av-special-heading.av-jhc3ylfa-e69f3d2ea4f1ca45379132611fcff224{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-jhc3ylfa-e69f3d2ea4f1ca45379132611fcff224 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-jhc3ylfa-e69f3d2ea4f1ca45379132611fcff224 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-jhc3ylfa-e69f3d2ea4f1ca45379132611fcff224 av-special-heading-h3  avia-builder-el-28  avia-builder-el-no-sibling '><h3 class='av-special-heading-tag '  itemprop=\"headline\"  >Related links<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-tix1n-03fbeadfae75efb106c9dae7b5f0320c\">\n.flex_column.av-tix1n-03fbeadfae75efb106c9dae7b5f0320c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-tix1n-03fbeadfae75efb106c9dae7b5f0320c av_one_third  avia-builder-el-29  el_after_av_one_full  el_before_av_one_third  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-24dm3-a3b9ceb628b014aead43fab5d2a507b7 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><a href=\"https:\/\/www.novacam.com\/pdf\/ApplicationNote_CMP_Pad_3D_Metrology.pdf\">\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-3m1tdz-b270831ef608938363c1f22dc62478a6\">\n.av_font_icon.av-3m1tdz-b270831ef608938363c1f22dc62478a6 .av-icon-char{\nfont-size:30px;\nline-height:30px;\n}\n<\/style>\n<span  class='av_font_icon av-3m1tdz-b270831ef608938363c1f22dc62478a6 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-iconfont avia-font-entypo-fontello av-no-color avia-icon-animate'><span class='av-icon-char' data-av_icon='\ue82d' data-av_iconfont='entypo-fontello' aria-hidden=\"true\" ><\/span><\/span> Download application note &#8220;CMP Pad Metrology&#8221;<\/a> [4 pages, PDF, 0.5 MB] for more details on this application<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-18g1gr-3fb8df32a9c94486c488f834c640d0cd\">\n.flex_column.av-18g1gr-3fb8df32a9c94486c488f834c640d0cd{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-18g1gr-3fb8df32a9c94486c488f834c640d0cd av_one_third  avia-builder-el-32  el_after_av_one_third  el_before_av_one_third  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-3ncs3-9755d2f2237c148e459fbf79ca214fb4 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-waioz-15129e036111ecc60b49fc74d64c8916\">\n.av_font_icon.av-waioz-15129e036111ecc60b49fc74d64c8916 .av-icon-char{\nfont-size:30px;\nline-height:30px;\n}\n<\/style>\n<span  class='av_font_icon av-waioz-15129e036111ecc60b49fc74d64c8916 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-iconfont avia-font-entypo-fontello av-no-color avia-icon-animate'><span class='av-icon-char' data-av_icon='\ue826' data-av_iconfont='entypo-fontello' aria-hidden=\"true\" ><\/span><\/span> See products used for CMP measurement:<\/p>\n<ul>\n<li><a href=\"https:\/\/www.novacam.com\/products\/profilometers\/\">OPTICAL 3D PROFILOMETER system<\/a><\/li>\n<li><a href=\"https:\/\/www.novacam.com\/products\/surfaceinspect-for-3d-metrology-dimensions-roughness-thickness\/\">SURFACEINSPECT system<\/a><\/li>\n<\/ul>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-18g1gr-3fb8df32a9c94486c488f834c640d0cd\">\n.flex_column.av-18g1gr-3fb8df32a9c94486c488f834c640d0cd{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-18g1gr-3fb8df32a9c94486c488f834c640d0cd av_one_third  avia-builder-el-35  el_after_av_one_third  avia-builder-el-last  flex_column_div av-zero-column-padding  column-top-margin'     ><p><div  class='avia-button-wrap av-jkoi6qsv-1173e5cca7a987612e23820de3bc7f83-wrap avia-button-left  avia-builder-el-36  el_before_av_textblock  avia-builder-el-first '>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jkoi6qsv-1173e5cca7a987612e23820de3bc7f83\">\n#top #wrap_all .avia-button.av-jkoi6qsv-1173e5cca7a987612e23820de3bc7f83{\nbackground-color:#ff9900;\nborder-color:#ff9900;\ncolor:#ffffff;\ntransition:all 0.4s ease-in-out;\n}\n#top #wrap_all .avia-button.av-jkoi6qsv-1173e5cca7a987612e23820de3bc7f83 .avia-svg-icon svg:first-child{\nfill:#ffffff;\nstroke:#ffffff;\n}\n<\/style>\n<a href='https:\/\/www.novacam.com\/fr\/nous-contacter-2\/nous-contacter\/'  class='avia-button av-jkoi6qsv-1173e5cca7a987612e23820de3bc7f83 av-link-btn avia-icon_select-no avia-size-x-large avia-position-left'   aria-label=\"Contact us!\"><span class='avia_iconbox_title' >Contact us!<\/span><\/a><\/div><br \/>\n<section  class='av_textblock_section av-3ncs3-9755d2f2237c148e459fbf79ca214fb4 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><a href=\"https:\/\/www.novacam.com\/contact-us\/contact-us\/\">\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1v8pg3-48925116ff62d88059331475f774c943\">\n.av_font_icon.av-1v8pg3-48925116ff62d88059331475f774c943 .av-icon-char{\nfont-size:30px;\nline-height:30px;\n}\n<\/style>\n<span  class='av_font_icon av-1v8pg3-48925116ff62d88059331475f774c943 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-iconfont avia-font-entypo-fontello av-no-color avia-icon-animate'><span class='av-icon-char' data-av_icon='\ue80b' data-av_iconfont='entypo-fontello' aria-hidden=\"true\" ><\/span><\/span><\/a>\u00a0<a href=\"https:\/\/www.novacam.com\/contact-us\/contact-us\/\">Contact us<\/a>\u00a0or <a href=\"https:\/\/www.novacam.com\/contact-us\/request-sample-analysis\/\">request free sample analysis<\/a> to learn how NOVACAM 3D metrology systems can benefit your CMP quality control<\/p>\n<\/div><\/section><\/p><\/div>\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":3,"featured_media":0,"parent":5488,"menu_order":12,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_relevanssi_hide_post":"","_relevanssi_hide_content":"","_relevanssi_pin_for_all":"on","_relevanssi_pin_keywords":"","_relevanssi_unpin_keywords":"","_relevanssi_related_keywords":"","_relevanssi_related_include_ids":"","_relevanssi_related_exclude_ids":"","_relevanssi_related_no_append":"","_relevanssi_related_not_related":"","_relevanssi_related_posts":"","_relevanssi_noindex_reason":"","footnotes":"","advanced-sidebar-menu\/link-title":"","advanced-sidebar-menu\/exclude-page":false},"class_list":["post-40124","page","type-page","status-publish","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.4 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>CMP pad measurement - Novacam<\/title>\n<meta name=\"description\" content=\"Micron precision, non-contact, automated 3D measurements of CMP pads, including pad grooves (high-aspect-ratio channels) and lands. Rapid and comprehensive measurements, including ability to measure in long profiles, bring CMP pad manufacturers unprecedented capabilities in quality control processes.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.novacam.com\/fr\/applications\/mesure-du-cmp-pad-2\/\" \/>\n<meta property=\"og:locale\" content=\"fr_CA\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"CMP pad measurement - Novacam\" \/>\n<meta property=\"og:description\" content=\"Micron precision, non-contact, automated 3D measurements of CMP pads, including pad grooves (high-aspect-ratio channels) and lands. Rapid and comprehensive measurements, including ability to measure in long profiles, bring CMP pad manufacturers unprecedented capabilities in quality control processes.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.novacam.com\/fr\/applications\/mesure-du-cmp-pad-2\/\" \/>\n<meta property=\"og:site_name\" content=\"Novacam\" \/>\n<meta property=\"article:modified_time\" content=\"2021-04-09T15:51:52+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.novacam.com\/wp-content\/uploads\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682.jpg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Estimation du temps de lecture\" \/>\n\t<meta name=\"twitter:data1\" content=\"17 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/www.novacam.com\\\/applications\\\/cmp-pad-measurement\\\/\",\"url\":\"https:\\\/\\\/www.novacam.com\\\/applications\\\/cmp-pad-measurement\\\/\",\"name\":\"CMP pad measurement - Novacam\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/www.novacam.com\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/www.novacam.com\\\/applications\\\/cmp-pad-measurement\\\/#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/www.novacam.com\\\/applications\\\/cmp-pad-measurement\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/www.novacam.com\\\/wp-content\\\/uploads\\\/CMP-pad-3d-non-contact-measurement-of-grooves_1b-e1591798319682.jpg\",\"datePublished\":\"2020-06-05T20:18:51+00:00\",\"dateModified\":\"2021-04-09T15:51:52+00:00\",\"description\":\"Micron precision, non-contact, automated 3D measurements of CMP pads, including pad grooves (high-aspect-ratio channels) and lands. 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