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µCam-3Dfiber based profilometer

Figure 1: µCam-3D detector with x-y scanning table and probes

µCam-3D is enabling micron precision, optical non-contact, high speed surface profiling detector, which can measure roughness, film thickness and obtain cross sectional measurements. It is based on low coherent interferometry.

µCam-3D is used for :

Industry specific applications

  • Semiconductor and electronics industry
  • Aerospace industry
  • Casting
  • Optical industry: Etching and deposition measurements for waveguides
  • Inspection of optical components
  • Forensic applications : bullet shape, cartridge, gun barrel inspection
  • Glass industries thickness measurements
  • Plastic industry: rheometry measurements
  • Fuel cell metrology

Key Benefits

  • Small fiber based probe
  • High resolution
  • Inhospitable environment
  • Insensitive to the environment lighting
  • Possible large standoff distance from the probe
  • Measurements possible far from detector enclosure
  • Advantage over triangulation sensors – does not need the angle between sensor and light projection

µCam-3D Specifications

light sourceSLD (super-luminescent diode)
wavelength1310 nm
acquisition rate1000 points / sec
depth range scanned < 8mm
standoff distancefrom few mm up to 1meter
axial resolution<0.2µm
lateral resolution: 8-75 µm (depending on the probe used)
distance of the probe from the detector enclosure<1km
  For additional informations or if you would like to receive our brochures, please contact us.
 


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