|Low-coherence profilometers reliably characterize surfaces with high-aspect-ratio features such as steps, grooves, channels, sharp edges, steep slopes, and holes. This is possible due to collinear scanning. Novacam profilometers offer:|
- Collinear scanning with fiber-based non-contact probes: the emitted and received light signals travel along an identical axis. No triangulation is necessary.
- High speed scanning: 1,000 to 30,000 points/sec and higher
- Sub-micron resolution: higher sensitivity than triangulation sensors and color confocal systems
Profile of a fuel cell bipolar plate surface with channels
Advantages of inspecting surfaces with fiber-based probes
|Because Novacam profilometers scan surfaces with fiber-based optical probes, they offer significant advantages:|
- They acquire long profiles: probes acquire surface data one point at a time, at high speeds of 1 to 30 kHz and higher. No need for time-consuming surface tiling.
- They offer configuration versatility for benchtop or in-process inspection. Probes are mounted onto a benchtop or inline motion mechanism suitable for each application: X-Y table, galvo-scanner, rotational scanner, robotic arm, etc.
- Probes can work far from profilometer enclosure, as far as 1 km away, without signal degradation.
- Small probes reach inside to inspect interiors of small-diameter tubes, bores, etc. See inspection in hard-to-reach spaces.
- Rugged probes perform even in extreme temperatures or in radiation. See inspection in hostile environments.
Novacam standard and small-diameter fiber-based optical probes
Applications across industries
|Novacam low-coherence profilometers inspect surfaces with high-aspect-ratio features in a range of industries.Example:|
- Semiconductor industry: CMP (Chemical Mechanical Polishing) pads used for wafer polishing are patterned with high-aspect channels. The surface condition of the CMP pads affects their polishing performance. Low-coherence profilometers are used in process to measure surface roughness parameters in order to optimize the timing of pad conditioning or replacement.
- Aerospace: blisks (integrally bladed rotors or IBRs), turbines, cooling holes
- Automotive: fuel injectors
- Medical device production: tool edges
- Dental: dental restoration inspection
- Fuel and solar cell production: bipolar plates
- Micro-machining: edges, holes, grooves
- Tool production: cutting tool fabrication and quality control
Height image of drill bit edge
Intensity image of drill bit edge