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LIBS and Profilometry

Low-coherence profilometers are useful for measuring the thickness of non-transparent coatings when combined with laser-induced breakdown spectroscopy (LIBS) technology (Figure 1). A LIBS device pulses a powerful laser beam focused on a sample which vaporizes some material, then it performs spectral analysis on the resulting plasma. Low-coherence profilometry can measure the depth to which material has been removed. Since the light sources used for both techniques are in the same range, customized devices have been constructed using a common light path configuration. These devices are ideal for measuring coating thickness.

Profilometry image and calculated volume loss of crater created by LIBS

Figure 1: A low-coherence profilometer can calculate the volume loss of a crater produced by a LIBS laser


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